http://ir-heat-ultra.com/zh/tags/%E5%9F%83%E7%93%A6%E6%B3%B0%E5%85%8B/ Recent content in 埃瓦泰克 on Ultra-Performance IR Heating Hugo zh Tue, 02 Jun 2026 06:02:13 +0800 http://ir-heat-ultra.com/zh/posts/evatec-evaporator-heating-lamp/ Tue, 02 Jun 2026 06:02:13 +0800 http://ir-heat-ultra.com/zh/posts/evatec-evaporator-heating-lamp/ <p><img src="http://ir-heat-ultra.com/images/e619a459508a95cd74ea4eae0be40cd1.png" alt="Evatec 蒸发器加热灯"></p> <p>在晶圆厂车间，光刻胶烘烤不仅仅是工艺中的一个步骤——它是公差窗口的边界。软烘烤或硬烘烤温度漂移2°C，会导致CD偏差，侧壁轮廓倾斜，并使颗粒计数超出规范。Evatec蒸发器加热灯设计用于稳固控制这一热边界。</p>