http://ir-heat-ultra.com/zh/tags/mems-%E5%BE%AE%E6%9C%BA%E7%94%B5%E7%B3%BB%E7%BB%9F/ Recent content in MEMS 微机电系统 on Ultra-Performance IR Heating Hugo zh Mon, 08 Jun 2026 05:03:16 +0800 http://ir-heat-ultra.com/zh/posts/mems-wafer-drying-heater/ Mon, 08 Jun 2026 05:03:16 +0800 http://ir-heat-ultra.com/zh/posts/mems-wafer-drying-heater/ <p><img src="http://ir-heat-ultra.com/images/e359da41a435291bc4b653b358552252.png" alt="MEMS 硅片干燥加热器"></p> <p>在晶圆厂车间，晶圆从最终漂洗阶段出来——计时开始。如果干燥加热器跟不上，就会有水分被困在光刻胶下，几个小时后表现为光刻缺陷。我们设计的MEMS晶圆干燥加热器，旨在从源头降低此风险：稳定的热量，循环周期间无波动。</p>